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Research and Development of Microwave Plasma Enhanced Chemical Vapor Deposition System Using the Fluid Modeling based on the Finite Element Method
- Authors
- Ming-Chieh Lin
- Issue Date
- 20-Oct-2022
- Publisher
- American Physical Society
- Citation
- 64th Annual Meeting of the APS Division of Plasma Physics
- Conference Name
- 64th Annual Meeting of the APS Division of Plasma Physics
- Place
- Spokane, WA, USA
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Lin, Ming Chieh
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)