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Introduction on atomic layer deposition for high-k dieletric & high mobility oxide semiconductor thin film transistors
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2021-08-02T13:58:11Z | - |
| dc.date.available | 2021-08-02T13:58:11Z | - |
| dc.date.issued | 2019-05-22 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/18341 | - |
| dc.title | Introduction on atomic layer deposition for high-k dieletric & high mobility oxide semiconductor thin film transistors | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | ULSIC vs TFT: 7th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors | - |
| dc.citation.conferencePlace | Palace Side Hotel, Kyoto, Japan | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)