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Structural analysis of the thermal annealing of molecular layer-deposited indicone and its application as a selective hard mask
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2023-04-03T16:33:57Z | - |
| dc.date.available | 2023-04-03T16:33:57Z | - |
| dc.date.issued | 2022-06-29 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/183486 | - |
| dc.title | Structural analysis of the thermal annealing of molecular layer-deposited indicone and its application as a selective hard mask | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | ALD 2022 | - |
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)