Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Plasma Ashing of Low-k Dielectric Films by using the Ferrite-Core Technologies
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김현우 | - |
| dc.date.accessioned | 2023-04-03T17:54:53Z | - |
| dc.date.available | 2023-04-03T17:54:53Z | - |
| dc.date.created | 2023-02-11 | - |
| dc.date.issued | 2022-11-14 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/183685 | - |
| dc.publisher | The Korean Society of Semiconductor & Display Technology (KSDT) | - |
| dc.title | Plasma Ashing of Low-k Dielectric Films by using the Ferrite-Core Technologies | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김현우 | - |
| dc.identifier.bibliographicCitation | 2022 KISM Korean International Semiconductor Conference on Manufacturing Technology 2022 | - |
| dc.relation.isPartOf | 2022 KISM Korean International Semiconductor Conference on Manufacturing Technology 2022 | - |
| dc.citation.title | 2022 KISM Korean International Semiconductor Conference on Manufacturing Technology 2022 | - |
| dc.citation.conferencePlace | 파라다이스 호텔 부산 해운대 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Hyoun Woo
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)