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Plasma Ashing of Low-k Dielectric Films by using the Ferrite-Core Technologies
- Authors
- 김현우
- Issue Date
- 14-Nov-2022
- Publisher
- The Korean Society of Semiconductor & Display Technology (KSDT)
- Citation
- 2022 KISM Korean International Semiconductor Conference on Manufacturing Technology 2022
- Conference Name
- 2022 KISM Korean International Semiconductor Conference on Manufacturing Technology 2022
- Place
- 파라다이스 호텔 부산 해운대
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Kim, Hyoun Woo
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)