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Atomic-Layer Deposited Tantalum-based Metal Gates (TaN, TaAlC, TaAlN, TaCoN) for Multiple VTH Modulation
- Authors
- 최창환
- Issue Date
- 29-Sep-2022
- Publisher
- 일본응용물리학회
- Citation
- Solid State Devices and Materials (SSDM)
- Conference Name
- Solid State Devices and Materials (SSDM)
- Place
- Chiba, Japan
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)