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Effect of SiNx Passivation Layer on the Radiation Efficiency of EUV Pellicle
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2023-04-03T19:34:52Z | - |
| dc.date.available | 2023-04-03T19:34:52Z | - |
| dc.date.issued | 20221114 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/184428 | - |
| dc.title | Effect of SiNx Passivation Layer on the Radiation Efficiency of EUV Pellicle | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | KISM 2022 | - |
| dc.citation.conferencePlace | 부산 파라다이스 호텔 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)