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Atomic Layer Deposition of MoNx thin film using New synthesized liquid Mo precursor
- Authors
- 전형탁
- Issue Date
- 28-Jun-2022
- Place
- 브뤼셀
- Conference Name
- 22nd International Conference on Atomic Layer Deposition
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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