Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Improvements of Self-Aligned Multi Patterning Spacer Technology by PEALD Sn-doped SiO2
- Authors
- 전형탁
- Issue Date
- 30-Nov-2022
- Place
- Hynes Convention Center l Boston, Massachusetts, USA
- Conference Name
- 2022 MRS Fall meeting&exhibit
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.