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Scavenger with Protonated Phosphite Ion for Incredible Nanoscale ZrO2-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical–Mechanical Planarization
- Authors
- 박재근
- Issue Date
- 15-Jun-2022
- Place
- 강원도 홍천 소노벨 비발디파크
- Conference Name
- 13th International Symposium for Advanced Functional Materials & Devices
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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