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Fenton Reaction for Enhancing Polishing Rate and Protonated Amine Functional Group Polymer for Inhibiting Corrosion in Ge1Sb4Te5 Film Surface Chemical-Mechanical-Planarization
- Authors
- 박재근
- Issue Date
- 14-Nov-2022
- Place
- 부산
- Conference Name
- Korean international semiconductor conference on manufactureing technology 2022
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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