Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Wi, Seong Ju | - |
dc.contributor.author | Jang, Yong Ju | - |
dc.contributor.author | Lee, Dong Gi | - |
dc.contributor.author | Kim, Seon Yong | - |
dc.contributor.author | Ahn, Jinho | - |
dc.date.accessioned | 2023-05-03T10:07:19Z | - |
dc.date.available | 2023-05-03T10:07:19Z | - |
dc.date.created | 2023-02-08 | - |
dc.date.issued | 2023-01 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/185039 | - |
dc.description.abstract | The extreme ultraviolet (EUV) pellicle is a freestanding membrane that protects EUV masks from particle contamination during EUV exposure. Although a high EUV transmittance of the pellicle is required to minimize the loss of throughput, the degradation of EUV transmittance during the extended exposure of the pellicle has been recently reported. This may adversely affect the throughput of the lithography process. However, the cause of this phenomenon has not yet been clarified. Therefore, we investigated the cause of the degradation in the EUV transmittance by observing the compositional change when the Ru/SiNx pellicle composite was heated in an emulated EUV scanner environment. The Ru thin film that was deposited at high pressure had more void networks but was not oxidized, whereas the SiNx thin film was oxidized after heating. This was because the void network in the Ru thin film served as a preferential diffusion path for oxygen and caused oxidation of the SiNx thin film. It was confirmed that the degradation of the EUV transmittance was due to the oxidation of SiNx. The results verified the effect of diffusivity in the thin film due to the void network on oxidation and EUV transmittance | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | MDPI | - |
dc.title | Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Ahn, Jinho | - |
dc.identifier.doi | 10.3390/membranes13010005 | - |
dc.identifier.scopusid | 2-s2.0-85146795242 | - |
dc.identifier.wosid | 000927740200001 | - |
dc.identifier.bibliographicCitation | MEMBRANES, v.13, no.1, pp.1 - 9 | - |
dc.relation.isPartOf | MEMBRANES | - |
dc.citation.title | MEMBRANES | - |
dc.citation.volume | 13 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 9 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | Y | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Biochemistry & Molecular Biology | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Polymer Science | - |
dc.relation.journalWebOfScienceCategory | Biochemistry & Molecular Biology | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Engineering, Chemical | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Polymer Science | - |
dc.subject.keywordPlus | OXIDATION | - |
dc.subject.keywordPlus | PERFORMANCE | - |
dc.subject.keywordAuthor | EUV pellicle | - |
dc.subject.keywordAuthor | EUV transmittance | - |
dc.subject.keywordAuthor | oxidation | - |
dc.subject.keywordAuthor | sputtering | - |
dc.subject.keywordAuthor | microstructure | - |
dc.subject.keywordAuthor | diffusion | - |
dc.identifier.url | https://www.mdpi.com/2077-0375/13/1/5 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.