Interpretation of the asymmetric color and shape of brownish ring in quartz crucible쿼츠도가니 표면에 발생하는 Brownish ring의 비대칭 color와 형상에 대한 해석
- Other Titles
- 쿼츠도가니 표면에 발생하는 Brownish ring의 비대칭 color와 형상에 대한 해석
- Authors
- Jung, Yoon Sung; Choi, Jae Ho; Min, Kyung Won; Byun, Young Min; Im, Won Bin; Kim, Hyeong-Jun
- Issue Date
- Dec-2022
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- quartz glass crucible; brownish ring; crystallization; oxygen deficiency; coloring of cristobalite; czochralski
- Citation
- 반도체디스플레이기술학회지, v.21, no.4, pp.50 - 52
- Indexed
- KCI
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 21
- Number
- 4
- Start Page
- 50
- End Page
- 52
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/185532
- ISSN
- 1738-2270
- Abstract
- Brownish rings (BRs) with white interiors are formed during the manufacture of silicon ingots in quartz glass crucibles. These BRs inhibit the yield of silicon ingots. However, the composition and mechanism of the formation of these BRs remain unclear thus far. Therefore, in this study, we analyzed the color and shape of these BRs. Raman analysis revealed that the brown and white colors appear owing to oxygen deficiency rather than crystallization from excess oxygen supply as previously assumed. Moreover, the dark shade of the brown areas depends on the degree of oxygen deficiency and the asymmetrical width of the brown areas is attributed to the direction of the molten silicon flow, which is influenced by the rotation and heat of the ingot crucible.
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