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Electron Beam Energy Control Using multi-DC Grid in Ar/CF4 Inductively Coupled Plasma
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2023-07-05T06:56:52Z | - |
| dc.date.available | 2023-07-05T06:56:52Z | - |
| dc.date.issued | 2023-03-06 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/186949 | - |
| dc.title | Electron Beam Energy Control Using multi-DC Grid in Ar/CF4 Inductively Coupled Plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 16th international conference on plasma nano technoligy & science | - |
| dc.citation.conferencePlace | gifu university(japan) | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)