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Galvanic corrosion inhibition from the aspect of bonding orbital theory in Cu/Ru barrier metal chemical mechanical planarization(CMP)
- Authors
- 백운규
- Issue Date
- 17-Nov-2022
- Publisher
- The society of powder technology, japan
- Citation
- ICCCI2022
- Conference Name
- ICCCI2022
- Place
- 일본 후지요시다 하이랜드리조트
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)