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Highly Dispersed Fe-Substituted Colloidal Silica Nanoparticles in Acidic pH region for Tungsten Chemical Mechanical Planarization (W CMP)
- Authors
- 백운규
- Issue Date
- 8-Mar-2023
- Place
- Palacio de Congresos of Valencia, Spain
- Conference Name
- MATSUS 2023 & S-TECH 2023
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)