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Reducing molybdenum dissolution in CMP process by controlling oxidation state
- Authors
- 백운규
- Issue Date
- 12-Apr-2023
- Place
- 라마다프라자 제주호텔
- Conference Name
- 2023 한국세라믹학회 춘계학술대회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)