Impact of Pt grain size on ferroelectric properties of zirconium hafnium oxide by chemical solution deposition
DC Field | Value | Language |
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dc.contributor.author | An Hoang-Thuy Nguyen | - |
dc.contributor.author | Manh-Cuong Nguyen | - |
dc.contributor.author | Anh-Duy Nguyen | - |
dc.contributor.author | Yim, Ji-Yong | - |
dc.contributor.author | Kim, Jeong-Han | - |
dc.contributor.author | Park, No-Hwal | - |
dc.contributor.author | Jeon, Seung-Joon | - |
dc.contributor.author | Kwon, Daewoong | - |
dc.contributor.author | Choi, Rino | - |
dc.date.accessioned | 2023-08-01T07:03:19Z | - |
dc.date.available | 2023-08-01T07:03:19Z | - |
dc.date.created | 2023-07-21 | - |
dc.date.issued | 2022-10 | - |
dc.identifier.issn | 2196-5404 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/188653 | - |
dc.description.abstract | The effects of the grain size of Pt bottom electrodes on the ferroelectricity of hafnium zirconium oxide (HZO) were studied in terms of the orthorhombic phase transformation. HZO thin films were deposited by chemical solution deposition on the Pt bottom electrodes with various grain sizes which had been deposited by direct current sputtering. All the samples were crystallized by rapid thermal annealing at 700 degrees C to allow a phase transformation. The crystallographic phases were determined by grazing incidence X-ray diffraction, which showed that the bottom electrode with smaller Pt grains resulted in a larger orthorhombic phase composition in the HZO film. As a result, capacitors with smaller Pt grains for the bottom electrode showed greater ferroelectric polarization. The smaller grains produced larger in-plane stress which led to more orthorhombic phase transformation and higher ferroelectric polarization. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | SPRINGER | - |
dc.title | Impact of Pt grain size on ferroelectric properties of zirconium hafnium oxide by chemical solution deposition | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kwon, Daewoong | - |
dc.identifier.doi | 10.1186/s40580-022-00334-6 | - |
dc.identifier.scopusid | 2-s2.0-85139438064 | - |
dc.identifier.wosid | 000864105500001 | - |
dc.identifier.bibliographicCitation | NANO CONVERGENCE, v.9, no.1, pp.1 - 6 | - |
dc.relation.isPartOf | NANO CONVERGENCE | - |
dc.citation.title | NANO CONVERGENCE | - |
dc.citation.volume | 9 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 6 | - |
dc.type.rims | ART | - |
dc.type.docType | 정기학술지(Article(Perspective Article포함)) | - |
dc.identifier.kciid | ART002959962 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | Y | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | INTERLAYER | - |
dc.subject.keywordPlus | THICKNESS | - |
dc.subject.keywordPlus | FILM | - |
dc.subject.keywordAuthor | Chemical solution deposition | - |
dc.subject.keywordAuthor | Hafnium zirconium oxide | - |
dc.subject.keywordAuthor | Pt bottom electrodes | - |
dc.subject.keywordAuthor | Phase transformation | - |
dc.subject.keywordAuthor | Pt grain size | - |
dc.identifier.url | https://nanoconvergencejournal.springeropen.com/articles/10.1186/s40580-022-00334-6 | - |
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