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A Sequential Neural Model towards Fault Detection and Classification for Semiconductor Manufacturing Processes
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Byeongtae | - |
| dc.contributor.author | Lee, Jongsoo | - |
| dc.contributor.author | Chae, Dong Kyu | - |
| dc.date.accessioned | 2023-08-07T07:44:23Z | - |
| dc.date.available | 2023-08-07T07:44:23Z | - |
| dc.date.created | 2023-07-21 | - |
| dc.date.issued | 2022-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/188897 | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | 한국반도체디스플레이기술학회 | - |
| dc.title | A Sequential Neural Model towards Fault Detection and Classification for Semiconductor Manufacturing Processes | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Chae, Dong Kyu | - |
| dc.identifier.bibliographicCitation | Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022 , pp.353 - 353 | - |
| dc.relation.isPartOf | Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022 | - |
| dc.citation.title | Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022 | - |
| dc.citation.startPage | 353 | - |
| dc.citation.endPage | 353 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Proceeding | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | other | - |
| dc.identifier.url | http://kism2022.kr/program.php | - |
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Related Researcher
- Chae, Dong Kyu
- COLLEGE OF ENGINEERING (SCHOOL OF COMPUTER SCIENCE)