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A Sequential Neural Model towards Fault Detection and Classification for Semiconductor Manufacturing Processes
- Authors
- Park, Byeongtae; Lee, Jongsoo; Chae, Dong Kyu
- Issue Date
- Nov-2022
- Publisher
- 한국반도체디스플레이기술학회
- Citation
- Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022 , pp.353 - 353
- Indexed
- OTHER
- Journal Title
- Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022
- Start Page
- 353
- End Page
- 353
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Collections - 서울 공과대학 > 서울 컴퓨터소프트웨어학부 > 1. Journal Articles
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Related Researcher
- Chae, Dong Kyu
- COLLEGE OF ENGINEERING (SCHOOL OF COMPUTER SCIENCE)