Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Applying XAI to Fault Detection and Classification for Semiconductor Manufacturing Processes
- Authors
- Lee, Jongsoo; Park, Byeongtae; Chae, Dong Kyu
- Issue Date
- Nov-2022
- Publisher
- 한국반도체디스플레이기술학회
- Citation
- Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022, pp.352 - 352
- Indexed
- OTHER
- Journal Title
- Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022
- Start Page
- 352
- End Page
- 352
- Files in This Item
- Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 컴퓨터소프트웨어학부 > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Chae, Dong Kyu
- COLLEGE OF ENGINEERING (SCHOOL OF COMPUTER SCIENCE)