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Work Function Control Of TiN Thin Films By N2 Plasma Post-treatment
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2023-08-16T08:51:38Z | - |
| dc.date.available | 2023-08-16T08:51:38Z | - |
| dc.date.issued | 2023-06-06 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/189373 | - |
| dc.title | Work Function Control Of TiN Thin Films By N2 Plasma Post-treatment | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | GCIM 2023(Global Conference on Innovation Materials) | - |
| dc.citation.conferencePlace | ICC JEJU, KOREA | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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