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Work Function Control Of TiN Thin Films By N2 Plasma Post-treatment

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dc.contributor.author전형탁-
dc.date.accessioned2023-08-16T08:51:38Z-
dc.date.available2023-08-16T08:51:38Z-
dc.date.issued20230606-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/189373-
dc.titleWork Function Control Of TiN Thin Films By N2 Plasma Post-treatment-
dc.typeConference-
dc.citation.conferenceNameGCIM 2023(Global Conference on Innovation Materials)-
dc.citation.conferencePlaceICC JEJU, KOREA-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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