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Work Function Control Of TiN Thin Films By N2 Plasma Post-treatment

Authors
전형탁
Issue Date
6-Jun-2023
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/189373
Place
ICC JEJU, KOREA
Conference Name
GCIM 2023(Global Conference on Innovation Materials)
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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