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CF3I 플라즈마의 SiO2 박막 에칭 효과
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- 박재근
- Issue Date
- 9-May-2019
- Conference Name
- 2019년 춘계학술대회 반도체&디스플레이산업 지속성장을 위한 기술혁신 전략
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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