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Simulation benchmarks of the PIC-MCC codes XPDP1 and VSim for capacitively coupled plasma helium discharges

Authors
Ming-Chieh Lin
Issue Date
30-Oct-2023
Publisher
The American Physical Society (APS)
Citation
The 65th Annual Meeting of the APS Division of Plasma Physics
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/192584
Conference Name
The 65th Annual Meeting of the APS Division of Plasma Physics
Place
Denver, CO, USA
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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