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The hole-patterned pellicle with a diameter of sub-220 nm as a solution to increase EUV transmittance
- Authors
- 안진호
- Issue Date
- 20231117
- Place
- 삿포로 KEIO plaza 호텔
- Conference Name
- MNC 2023
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)