Gas type optimization for dry development of CF4-based plasma on organic-inorganic hybrid EUV photoresist
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안진호 | - |
dc.date.accessioned | 2023-12-13T09:30:32Z | - |
dc.date.available | 2023-12-13T09:30:32Z | - |
dc.date.issued | 20231117 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/193809 | - |
dc.title | Gas type optimization for dry development of CF4-based plasma on organic-inorganic hybrid EUV photoresist | - |
dc.type | Conference | - |
dc.citation.conferenceName | MNC 2023 | - |
dc.citation.conferencePlace | 삿포로 KEIO plaza 호텔 | - |
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