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Atomic Layer Deposition for Nanoscale Oxide Semiconductor Field Effect Transistors : Four Values and Outlook

Authors
박진성
Issue Date
20231120
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/193819
Place
부산 해운대
Conference Name
KISM 2023
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Park, Jinseong
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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