Analysis on effects of design variable uncertainty on the performance of MEMS gyroscope based on sample statistics

Abstract

Micro scale products such as a MEMS gyroscope usually have relatively large manufacturing uncertainty compared to normal macro scale products. The material and geometric uncertainties caused by a micro manufacturing process inevitably lead to the uncertainty of the product performance. Therefore to achieve a reliable design of a product, the performance uncertainty of the product needs to be estimated. In this paper, the equations of motion of a MEMS gyroscope model are derived to analyze performance indices such as sensitivity and bandwidth. The statistics of some critical design variables are determined from the performance requirements. Finally a statistical procedure based on sample statistics is proposed to estimate the confidence interval of the performance statistics.