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차세대 EUV 마스크용 Pt 기반 흡수 소재 식각 특성 향상 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2024-12-01T11:00:26Z | - |
| dc.date.available | 2024-12-01T11:00:26Z | - |
| dc.date.issued | 2024-06-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/198889 | - |
| dc.title | 차세대 EUV 마스크용 Pt 기반 흡수 소재 식각 특성 향상 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | KIEEME 2024 | - |
| dc.citation.conferencePlace | 부산BEXCO컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)