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A novel solution for next-generation EUV pellicle: breathable membrane with increased transmittance
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2024-12-01T11:00:28Z | - |
| dc.date.available | 2024-12-01T11:00:28Z | - |
| dc.date.issued | 2024-02-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/198907 | - |
| dc.title | A novel solution for next-generation EUV pellicle: breathable membrane with increased transmittance | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2024 SPIE Advanced Lithography + Patterning | - |
| dc.citation.conferencePlace | 미국 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)