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Fizeau Interferometer for Evaluating Extreme Ultraviolet Attenuated Phase Shift Mask
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2024-12-01T11:00:28Z | - |
| dc.date.available | 2024-12-01T11:00:28Z | - |
| dc.date.issued | 2024-01-18 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/198909 | - |
| dc.title | Fizeau Interferometer for Evaluating Extreme Ultraviolet Attenuated Phase Shift Mask | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2024 nano convergence conference | - |
| dc.citation.conferencePlace | 대전컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)