Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Fluorine 및 chlorine계 플라즈마 적용 유기-무기 수직분자선 다층 분자막 EUV 포토레지스트의 건식 현상 성능 비교 평가
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2024-12-01T11:00:28Z | - |
| dc.date.available | 2024-12-01T11:00:28Z | - |
| dc.date.issued | 2024-01-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/198916 | - |
| dc.title | Fluorine 및 chlorine계 플라즈마 적용 유기-무기 수직분자선 다층 분자막 EUV 포토레지스트의 건식 현상 성능 비교 평가 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 31th Korean Conference on Semiconductors | - |
| dc.citation.conferencePlace | 경주화백컨벤션센터 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)