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Epitaxial growth 를 통한 Poly-Si 기판에서의 선택적 증착 특성 연구

Authors
안진호
Issue Date
24-Jan-2024
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/198919
Place
경주화백컨벤션센터
Conference Name
The 31th Korean Conference on Semiconductors
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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