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The effect of gradient DC magnetic field on ion density and electron temperature in the inductively coupled plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2024-12-02T23:30:36Z | - |
| dc.date.available | 2024-12-02T23:30:36Z | - |
| dc.date.issued | 2023-08-22 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199395 | - |
| dc.title | The effect of gradient DC magnetic field on ion density and electron temperature in the inductively coupled plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제65회 한국진공학회 | - |
| dc.citation.conferencePlace | 신화월드(제주) | - |
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