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그리드를 적용한 축전 결합 플라즈마에서 전자 에너지 분포 변화 연구

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dc.contributor.author정진욱-
dc.date.accessioned2024-12-02T23:30:37Z-
dc.date.available2024-12-02T23:30:37Z-
dc.date.issued2023-08-22-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199401-
dc.title그리드를 적용한 축전 결합 플라즈마에서 전자 에너지 분포 변화 연구-
dc.typeConference-
dc.citation.conferenceName제65회 한국진공학회-
dc.citation.conferencePlace신화월드(제주)-
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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