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전자 빔의 에너지에 따른 Ar/O2 플라즈마의 electronegativity 특성 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2024-12-02T23:30:37Z | - |
| dc.date.available | 2024-12-02T23:30:37Z | - |
| dc.date.issued | 2024-02-15 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199414 | - |
| dc.title | 전자 빔의 에너지에 따른 Ar/O2 플라즈마의 electronegativity 특성 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제66회 한국진공학회 | - |
| dc.citation.conferencePlace | 휘닉스파크 강원도 평창 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)