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Modulating Electron Energy Probability Functions with 2 MHz Power in Dual-Frequency (2/27.12 MHz) Inductively Coupled Plasma : Effects of Oxygen/Argon Discharges at Low Pressure
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2024-12-02T23:30:38Z | - |
| dc.date.available | 2024-12-02T23:30:38Z | - |
| dc.date.issued | 2024-06-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199422 | - |
| dc.title | Modulating Electron Energy Probability Functions with 2 MHz Power in Dual-Frequency (2/27.12 MHz) Inductively Coupled Plasma : Effects of Oxygen/Argon Discharges at Low Pressure | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 3rd International Fusion And Plasma Conference | - |
| dc.citation.conferencePlace | Seoul Olympic Parktel, Seoul, Korea | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)