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차세대 디바이스를 위한 자기조립 단층을 이용한 코발트 금속층의 선택적 영역 원자층 증착

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dc.contributor.author최창환-
dc.date.accessioned2024-12-04T10:30:37Z-
dc.date.available2024-12-04T10:30:37Z-
dc.date.issued2023-04-27-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199951-
dc.title차세대 디바이스를 위한 자기조립 단층을 이용한 코발트 금속층의 선택적 영역 원자층 증착-
dc.typeConference-
dc.citation.conferenceName대한금속재료학회 춘계학술대회-
dc.citation.conferencePlace제주국제컨벤션센터(ICC JEJU)-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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