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차세대 디바이스를 위한 자기조립 단층을 이용한 코발트 금속층의 선택적 영역 원자층 증착
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최창환 | - |
| dc.date.accessioned | 2024-12-04T10:30:37Z | - |
| dc.date.available | 2024-12-04T10:30:37Z | - |
| dc.date.issued | 2023-04-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/199951 | - |
| dc.title | 차세대 디바이스를 위한 자기조립 단층을 이용한 코발트 금속층의 선택적 영역 원자층 증착 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 대한금속재료학회 춘계학술대회 | - |
| dc.citation.conferencePlace | 제주국제컨벤션센터(ICC JEJU) | - |
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