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In-Situ ALD-Assisted Subthreshold Swing Control in IGZO/Al2O3 Multi Channel Structured TFT
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2024-12-05T04:00:24Z | - |
| dc.date.available | 2024-12-05T04:00:24Z | - |
| dc.date.issued | 2023-08-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/200466 | - |
| dc.title | In-Situ ALD-Assisted Subthreshold Swing Control in IGZO/Al2O3 Multi Channel Structured TFT | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | IMID 2023 | - |
| dc.citation.conferencePlace | 부산 해운대 | - |
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