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Synthesis of Superior-Performance InGaZnO Based on Ideal Reaction of Plasma Enhanced Atomic Layer Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2024-12-05T04:00:25Z | - |
| dc.date.available | 2024-12-05T04:00:25Z | - |
| dc.date.issued | 2023-05-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/200472 | - |
| dc.title | Synthesis of Superior-Performance InGaZnO Based on Ideal Reaction of Plasma Enhanced Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | Society for Information Display 2023 | - |
| dc.citation.conferencePlace | Los angeles | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)