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Growth Behaviors and Structural Characterization of PEALD In2O3 thin films usinig Amide-based and Alkyl-Based Novel Indium Precursors
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2024-12-05T04:00:25Z | - |
| dc.date.available | 2024-12-05T04:00:25Z | - |
| dc.date.issued | 2023-07-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/200473 | - |
| dc.title | Growth Behaviors and Structural Characterization of PEALD In2O3 thin films usinig Amide-based and Alkyl-Based Novel Indium Precursors | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | ALD 2023 | - |
| dc.citation.conferencePlace | BELLEVUE, WASHINGTON, USA | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)