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High-Performance Oxide Thin-Film Transistors based on Indium with Nano-Iaminate Structure using Plasma-Enhanced Atomic Layer Deposition

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dc.contributor.author정재경-
dc.date.accessioned2024-12-05T09:30:25Z-
dc.date.available2024-12-05T09:30:25Z-
dc.date.issued2023-11-29-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/200641-
dc.titleHigh-Performance Oxide Thin-Film Transistors based on Indium with Nano-Iaminate Structure using Plasma-Enhanced Atomic Layer Deposition-
dc.typeConference-
dc.citation.conferenceNameMRS 2023-
dc.citation.conferencePlaceBoston, Massachusetts-
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COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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