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Improving Specific Contact Resistivity of amorphous IGZO Thin-Film Transistors through ALD-AZO IL and Optimal Annealing Temperature

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dc.contributor.author정재경-
dc.date.accessioned2024-12-05T09:30:25Z-
dc.date.available2024-12-05T09:30:25Z-
dc.date.issued2024-03-28-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/200650-
dc.titleImproving Specific Contact Resistivity of amorphous IGZO Thin-Film Transistors through ALD-AZO IL and Optimal Annealing Temperature-
dc.typeConference-
dc.citation.conferenceNameITC 2024-
dc.citation.conferencePlaceKAIST, Korea-
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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Jeong, Jae Kyeong
COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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