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Vertically tailored hybrid multilayer EUV photoresist with vertical molecular wire structure
- Authors
- 성명모
- Issue Date
- 27-Feb-2024
- Place
- 산호세
- Conference Name
- SPIE Advanced Lithography + Patterning (AL24)
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Collections - 서울 자연과학대학 > 서울 화학과 > 2. Conference Papers
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Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)