Fabrication of CuO and Cu2O Nanoparticles in a Thick Polyimide Film by Post Heat Treatment in a Controlled-Atmosphere

Abstract

We investigated the formation of CuO or Cu2O nanoparticles in the thick polyimide films by oxidizing Cu nanoparticles at various temperatures during the post heat-treatment. Cu nanoparticles of 4-5 nm in diameter were initially formed in the polyimide film by the reaction between a Cu film and a polyimide precursor, polyamic acid, and a following thermal curing in a reducing atmosphere. After the subsequent post heat-treatments in oxidizing atmospheres, X-ray diffraction patterns revealed that initial metallic Cu nanoparticles were transformed to Cu2O or CuO nanoparticles depending on the temperature during the post heat-treatment. Cu nanoparticles were oxidized to Cu2O during the post heat-treatment at low temperature while Cu nanoparticles were oxidized to CuO during the post heat-treatment at high temperature. Cross-sectional TEM studies showed that about 4.7 nm sized Cu2O nanoparticles or 4.7-5.2 nm sized CuO nanoparticles were fabricated in a thick polyimide film depending on the post heat-treatment condition. In the optical absorption measurements, the absorption peak from surface plasmon resonance of Cu nanoparticles disappeared during the post heat-treatment in an oxidizing atmosphere.