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Self-Aligned Fabrication of Sub-50 nm Top Gate Coplanar IGZO/ITO Thin-Film Transistors without Nanoscale Patterning

Authors
이승백
Issue Date
24-Apr-2024
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/204796
Place
Seattle Convention Center, Seattle Washington, USA
Conference Name
2024 MRS spring meeting
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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Lee, Seung Beck
COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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