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Enhancing Hydrogen-Resistance and Stability in IGZO-TFTs using Al2O3 Gate Insulators with N2O Plasma Reactant

Authors
박진성
Issue Date
21-Aug-2024
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/205236
Place
ICC Jeju, Jeju, Korea
Conference Name
IMID 2024
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Park, Jinseong
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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