Anisotropic temperature-dependent thermal conductivity by an Al₂O₃ interlayer in Al₂O₃/ZnO superiattice films
DC Field | Value | Language |
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dc.contributor.author | Lee, Won-Yong | - |
dc.contributor.author | Lee, Jung-Hoon | - |
dc.contributor.author | Ahn, Jae-Young | - |
dc.contributor.author | Park, Tae-Hyun | - |
dc.contributor.author | Park, No-Won | - |
dc.contributor.author | Kim, Gil-Sung | - |
dc.contributor.author | Park, Jin-Seong | - |
dc.contributor.author | Lee, Sang-Kwon | - |
dc.date.accessioned | 2021-08-02T15:31:12Z | - |
dc.date.available | 2021-08-02T15:31:12Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2017-03 | - |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/20527 | - |
dc.description.abstract | The thermal conductivity of superlattice films is generally anisotropic and should be studied separately in the in-plane and cross-plane directions of the films. However, previous works have mostly focused on the cross-plane thermal conductivity because the electrons and phonons in the cross-plane direction of superlattice films may result in much stronger interface scattering than that in the in-plane direction. Nevertheless, it is highly desirable to perform systematic studies on the effect of interface formation in semiconducting superlattice films on both in-plane and cross-plane thermal conductivities. In this study, we determine both the in-plane and cross-plane thermal conductivities of Al₂O₃ (AO)/ZnO superlattice films grown by atomic layer deposition (ALD) on SiO₂/Si substrates in the temperature range of 50-300 K by the four-point-probe 3-ω method. Our experimental results indicate that the formation of an atomic AO layer (0.82 nm) significantly contributes to the decrease of the cross-plane thermal conductivity of the AO/ZnO superlattice films compared with that of AO/ZnO thin films. The cross-plane thermal conductivity (0.26-0.63 W m⁻¹ K⁻¹ of the AO/ZnO superlattice films (with an AO layer of ∼0.82 nm thickness) is approximately ∼150%-370% less than the in-plane thermal conductivity (0.96⁻¹.19 W m⁻¹ K⁻¹) of the corresponding film, implying significant anisotropy. This indicates that the suppression of the cross-plane thermal conductivity is mainly attributed to the superlattice, rather than the nanograin columnar structure in the films. In addition, we theoretically analyzed strong anisotropic behavior of the in-plane and cross-plane thermal conductivities of the AO/ZnO superlattice films in terms of temperature dependence. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | Anisotropic temperature-dependent thermal conductivity by an Al₂O₃ interlayer in Al₂O₃/ZnO superiattice films | - |
dc.title.alternative | Anisotropic temperature-dependent thermal conductivity by an Al2O3 interlayer in Al2O3/ZnO superiattice films | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin-Seong | - |
dc.identifier.doi | 10.1088/1361-6528/aa5985 | - |
dc.identifier.scopusid | 2-s2.0-85013168133 | - |
dc.identifier.wosid | 000395765300001 | - |
dc.identifier.bibliographicCitation | NANOTECHNOLOGY, v.28, no.10 | - |
dc.relation.isPartOf | NANOTECHNOLOGY | - |
dc.citation.title | NANOTECHNOLOGY | - |
dc.citation.volume | 28 | - |
dc.citation.number | 10 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | ENHANCED THERMOELECTRIC PROPERTIES | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | SUPERLATTICE STRUCTURES | - |
dc.subject.keywordPlus | 3-OMEGA METHOD | - |
dc.subject.keywordPlus | REDUCTION | - |
dc.subject.keywordPlus | NANOWIRES | - |
dc.subject.keywordPlus | ANTIMONY | - |
dc.subject.keywordPlus | SB2TE3 | - |
dc.subject.keywordPlus | INTERFACE | - |
dc.subject.keywordPlus | DEVICES | - |
dc.subject.keywordAuthor | thermal conductivity | - |
dc.subject.keywordAuthor | superlattice films | - |
dc.subject.keywordAuthor | phonon scattering | - |
dc.subject.keywordAuthor | 3-omega measurement | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1088/1361-6528/aa5985 | - |
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