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Exploring Electromagnetic Effects in High Frequency Helium Capacitively Coupled Plasma Discharges Using 1-D EM PIC-MCC Simulations
- Authors
- Ming-Chieh Lin
- Issue Date
- 7-Oct-2024
- Place
- Atlanta, Georgia
- Conference Name
- The 66th Annual Meeting of the APS Division of Plasma Physics
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Lin, Ming Chieh
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)